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Interferometer for optical waviness and figure testing

著者名:
Freischlad,K.R. ( Phase Shift Technology(USA) )  
掲載資料名:
Optical inspection and micromeasurements II : 16-19 June 1997, Munich, FRG
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3098
発行年:
1997
開始ページ:
53
終了ページ:
61
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425188 [0819425184]
言語:
英語
請求記号:
P63600/3098
資料種別:
国際会議録

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