Blank Cover Image

Characterization of pattern density and the metal stack composition on chlorine residues from the metal etch process

著者名:
  • Loong,S.Y. ( National Univ.of Singapore and Chartered Semiconductor Manufacturing Ltd. (Singapore) )
  • Lee,H.K. ( National Univ.of Singapore )
  • Zhou,M.S. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
  • Chan,L.H. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
  • Premachandran,V. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
掲載資料名:
Multilevel Interconnect Technology II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3508
発行年:
1998
開始ページ:
170
終了ページ:
180
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429674 [0819429678]
言語:
英語
請求記号:
P63600/3508
資料種別:
国際会議録

類似資料:

Loong,S.Y., Lee,H.K., Chan,L.H., Zhou,M.S., Loh,F.C., Tan,K.L.

SPIE-The International Society for Optical Engineering

Premachandran,V., Joy,R., Ho,P.K.K., Lok,L.W., Schulke,T., Tsai,Y.

SPIE-The International Society for Optical Engineering

Gerung,H., Chhagan,V.K., Yelehanka,P.R., Zhou,M.S., Hui,J.K.L.

SPIE - The International Society for Optical Engineering

Chen,S.Y., Shen,Z.X., Xu,S.Y., See,A.K., Chan,L.H., Li,W.S.

SPIE-The International Society for Optical Engineering

S.C. Ur, Y.G. Choi, J.C. Kwon, S.L. Ryu, Y.G. Lee, J.L. Lee, L.H. Kim, T.W. Hong, S.Y. Kwon, M.S. Yoon

Trans Tech Publications

Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S.

Materials Research Society

Ong,S.Y., Chor,E.F., Leung,Y.K., Lee,J., Li,W.S., See,A., Chan,L.H.

SPIE-The International Society for Optical Engineering

Lee,L.H., Gunawan,O., Ooi,B.S., Zhou,Y., Chan,Y.C., Lam,Y.L.

SPIE - The International Society for Optical Engineering

Lim,H.S., Ong,T.K., Ooi,B.S., Lam,Y.L., Chan,Y.C., Zhou,Y.

SPIE - The International Society for Optical Engineering

S.Y. Chen, Z.C. Sun, L.H. Li

Trans Tech Publications

Ang,T.C., Tse,M.S., Loong,S.Y., Wong,Y.C., Loh,W.B.

SPIE-The International Society for Optical Engineering

Peters, D., Egbe, M., Ravito, R., Rieker, J., Fiener, S., Tea, T., Seong, T.-K., Nguyen, L.V., Henry, S-A., Gaulhofer, …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12