Integration of hydrogen silsesquioxane into an advanced BiCMOS process

Integration of hydrogen silsesquioxane into an advanced BiCMOS process

著者名:

Olewine,M. ( Philips Semiconductors )
Wall,R. ( Philips Semiconductors )
Colovos,C.J. ( Philips Semiconductors )

掲載資料名:

Multilevel Interconnect Technology II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3508

発行年:

1998

開始ページ:

42

終了ページ:

50

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429674 [0819429678]

言語:

英語

請求記号:

P63600/3508

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020162
シリーズID:	PA00000029
会議名:	Microelectronic Manufacturing : Multilevel Interconnect Technology
回次:	1998 : 2nd
会議開催地:	Santa Clara, CA, USA
会議開催年:	1998.09.23-1998.09.24

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