Real-time error compensation of coordinate measurement system using combined gratings

Real-time error compensation of coordinate measurement system using combined gratings

著者名:

Tang,W. ( Tsinghua Univ.(China) )
Zhang,Y. ( Tsinghua Univ.(China) )
Duan,M. ( Tsinghua Univ.(China) )
Li,L. ( Tsinghua Univ.(China) )
Fang,Z. ( Tsinghua Univ.(China) )

掲載資料名:

Automated optical inspection for industry: theory, technology, and applications II : 16-19 September, 1998, Beijing, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3558

発行年:

1998

開始ページ:

323

終了ページ:

332

出版情報:

Bellingham, Washington: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430199 [0819430196]

言語:

英語

請求記号:

P63600/3558

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020160
シリーズID:	PA00000029
会議名:	Photonics China : Automated Optical Inspection for Industry
回次:	1998 : 2nd
会議開催地:	Beijing, China
会議開催年:	1998.09.16-1998.09.19

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