Computer-aided testing for contact-type interferometer
- 著者名:
- 掲載資料名:
- Automated optical inspection for industry: theory, technology, and applications II : 16-19 September, 1998, Beijing, China
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3558
- 発行年:
- 1998
- 開始ページ:
- 283
- 終了ページ:
- 287
- 出版情報:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430199 [0819430196]
- 言語:
- 英語
- 請求記号:
- P63600/3558
- 資料種別:
- 国際会議録
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