16-k infrared micromirror arrays with large-beam deflection and .10-mm pixel size

16-k infrared micromirror arrays with large-beam deflection and .10-mm pixel size

著者名:

Reimer,K. ( Fraunhofer-Institute for Silicon Technology )
Engelke,R.
Witt,M.
Wagner,B.

掲載資料名:

Miniaturized Systems with Micro-Optics and MEMS

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3878

発行年:

1999

開始ページ:

272

終了ページ:

280

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434753 [0819434752]

言語:

英語

請求記号:

P63600/3878

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019945
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Miniaturized Systems with Miccro-Optics and MEMS
回次:	1999
会議開催地:	Santa Clara, CA, USA
会議開催年:	1999.09.20-1999.09.21

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