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Low-temperature approaches for fabrication of high-frequency microscanners

著者名:
Hiller,K. ( Chemnitz Univ.of Technology )
Hahn,R.
Kaufmann,C.
Kurth,S.
Kehr,K.
Gessner,T.
Dotzel,W.
Wiemer,M.
Schubert,I.
さらに 4 件
掲載資料名:
Miniaturized Systems with Micro-Optics and MEMS
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3878
発行年:
1999
開始ページ:
58
終了ページ:
66
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434753 [0819434752]
言語:
英語
請求記号:
P63600/3878
資料種別:
国際会議録

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