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Optical constants of sputtered U and a-Si at 30.4 and 58.4 nm

著者名:
掲載資料名:
EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3767
発行年:
1999
開始ページ:
288
終了ページ:
294
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432537 [0819432539]
言語:
英語
請求記号:
P63600/3767
資料種別:
国際会議録

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