Blank Cover Image

THE EFFECT OF ANNEALING ON THE Cu DISTRIBUTION AND Al2Cu PRECIPITATION IN Al(Cu) THIN FILMS

著者名:
掲載資料名:
Materials reliability in microelectronics III : symposium held April 12-15, 1993, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
309
発行年:
1993
開始ページ:
423
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992054 [1558992057]
言語:
英語
請求記号:
M23500/309
資料種別:
国際会議録

類似資料:

1 国際会議録 In-Plane Crystallographic Texture of bcc Metal Thin Films on Amorphous Substrates

Harper, J. M. E., Rodbell, K. P., Colgan, E. G., Hammond, R. H.

MRS - Materials Research Society
7 国際会議録 EFFECT OF LINE WIDTH ON ELECTROMIGRATION OF TEXTURED PURE ALUMINUM FILMS

Knorr, D. B., Rodbell, K. P.

MRS - Materials Research Society
2 国際会議録 GRAIN GROWTH IN Al-(Cu, Pd, Nb) THIN FILMS

Mis, J. D., Rodbell, K. P.

MRS - Materials Research Society
8 国際会議録 TEXTURE EFFECTS ON THE ELECTROMIGRATION BEHAVIOR OF LAYERED Ti/A1Cu/Ti FILMS

Rodbell, K. P., Knorr, D. B., Tracy, D. P.

Materials Research Society
3 国際会議録 CORRELATION OF THE STRESS-TEMPERATURE HISTORY WITH MICROSTRUCTURE IN Al-0.5Cu AND Al-0.15Pd THIN FILMS

Knorr, D. D., Rodbell, K. P.

MRS - Materials Research Society
9 国際会議録 Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films

Rodbell, K.P., Petkov, M.P., Weber, M.H., Lynn, K.G., Volksen, W., Miller, R.D.

Trans Tech Publications
4 国際会議録 MANUFACTURABILITY VERSUS RELIABILITY ISSUES RELEVANT TO INTERCONNECT METALLIZATIONS

Rodbell, K. P., Colgan, E. G., Hu, C-K.

MRS - Materials Research Society
10 国際会議録 Effect of Annealing on the Structural, Mechanical and Tribological Properties of Electroplated Cu Thin Films

Shukla, P., Sikder, A.K., Zantye, P.B., Kumar, Ashok, Sanganaria, M.

Materials Research Society
5 国際会議録 Characterization of Plated Cu Thin Film Microstructures

Gignac, L. M., Rodbell, K. P., Cabral, C., Jr., Andricacos, P. C., Rice, P. M., Beyers, R. B., Locke, P. S., Klepeis, S. …

MRS - Materials Research Society
11 国際会議録 Phase Formation in Cu(Sn) Alloy Thin Films

Clevenger, L. A., Arcot, B., Ziegler, W., Colgan, E. G., Hong, Q. Z., d'Heurle, F. M., Cabral, C., Jr., Gallo, T. A., …

MRS - Materials Research Society
6 国際会議録 Characterization of Plated Cu Thin Film Microstructures

Beyers, R. B., Cabral, C., Gignac, L. M., Klepeis, S. J., Locke, P. S., ricacos, P. C., Rice, P. M., Rodbell, K. P.

Materials Research Society
12 国際会議録 IN-SITU PRODUCTION OF SUPERCONDUCTING YBa2Cu3O7-y THIN FILMS BY HIGH PRESSURE REACTIVE EVAPORATION WITH RAPID THERMAL ANNEALING

Lathrop, D. K., Russek, S. E., Buhrman, R. A.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12