
Focused Ion Beam Etching of GaN
- 著者名:
Flierl, C. White, I. H. Kuball, M. Heard, P. J. Allen, G. C. Marinelli, C. Rorison, J. M. Penty, R. V. Chen, Y. Wang, S. Y. - 掲載資料名:
- GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 537
- 発行年:
- 1999
- 開始ページ:
- G6.57.1
- 出版情報:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994430 [1558994432]
- 言語:
- 英語
- 請求記号:
- M23500/537
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
2
![]() SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
MRS-Materials Research Society |
SPIE - The International Society of Optical Engineering |