Repid Thermal Processing of Implanted GaN Up to 1500°C | 東京工業大学附属図書館文献データベース

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Repid Thermal Processing of Implanted GaN Up to 1500°C

著者名:

Abernathy, C. R.

Pennycook, S. J.

さらに 8 件

掲載資料名:

GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

537

発行年:

1999

開始ページ:

G6.33.1

出版情報:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994430 [1558994432]

言語:

英語

請求記号:

M23500/537

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019847
シリーズID:	PA00000011
会議名:	Symposium on GaN and related alloys
回次:	1998
会議開催地:	Boston, MA, USA
会議開催年:	1998.11.30-1998.12.04

類似資料:

1 国際会議録 Activation characteristics of donor and acceptor implants in GaN Cao, X. A., Pearton, S. J., Singh, R. K., Wilson, R. G., Sekhar, J. A., Zolper, J. C., Han, J., Rieger, D. J., Shul, R. … MRS-Materials Research Society	7 国際会議録 Properties of H, O and C in GaN Pearton, S. J., Abernathy, C. R., Lee, J. W., Vartuli, C. B., MacKenzie, J. D., Ren, F., Wilson, R. G., Zavada, J. M., … MRS - Materials Research Society
2 国際会議録 Ultrahigh Implant Activation Efficiency in GaN Using Novel High Temperature RTP System Cao, X. A., Abernathy, C. R., Singh, R. K., Pearton, S. J., Fu, M., Sarvepalli, V., Sekhar, J. A., Zolper, J. C., … MRS - Materials Research Society	8 国際会議録 Ion Implantation Doping and High Temperature Annealing of GaN Zolper, J. C., Crawford, M. Hagerott, Howard, A. J., Pearton, S. J., Abernathy, C. R., Vartuli, C. B., Yuan, C., Stall, … MRS - Materials Research Society
3 国際会議録 A Novel Technique for RTP Annealing of Compound Semiconductors Fu, M., Sarvepalli, V., Singh, R. K., Abernathy, C. R., Cao, X., Pearton, S. J., Sekhar, J. A. MRS - Materials Research Society	9 国際会議録 p- and n-Type Implantation Doping of GaN with Ca and O Zolper, J. C., Wilson, R. G., Pearton, S. J., Stall, R. A. MRS - Materials Research Society
4 国際会議録 Behavior of W and WSix Contact Metallization on n- and P-Type GaN Cao, X. A., Ren, F., Lothian, J. R., Pearton, S. J., Abernathy, C. R., Zolper, J. C., Cole, M. W., Zeitouny, A., … MRS - Materials Research Society	10 国際会議録 High temperature Stable W and WSi contacts on n- and p-GaN Cao, X.A., Ren, F., Pearton, S.J., Zeitouny, A., Eisenber, M., Zopler, J.C., Abernathy, C.R., Han, J., Shul, R.J., … Electrochemical Society
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