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Diamondlike Carbon Materials as Low-k Dielectrics for Multilevel Interconnects in ULSI

著者名:
Grill, A.
Patel, V.
Saenger, K. L.
Jahnes, C.
Cohen, S. A.
Schrott, A. G.
Edelstein, D. C.
Paraszczak, J. R.
さらに 3 件
掲載資料名:
Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
443
発行年:
1997
開始ページ:
155
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993471 [1558993479]
言語:
英語
請求記号:
M23500/443
資料種別:
国際会議録

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