Electrode Materials for Ferroelectric Capacitors: Properties of Reactive DC Sputtered IrO2 Thin Films
- 著者名:
Balu, Venkatasubramani Chen, Tung-Sheng Jiang, Bo Kuah, Shao-Hong Lee, Jack C. Chu, Peir Jones, Robert E. Zurcher, Peter Taylor, Deborah J. Gillespie, Sherry - 掲載資料名:
- Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 433
- 発行年:
- 1996
- 開始ページ:
- 139
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993365 [1558993363]
- 言語:
- 英語
- 請求記号:
- M23500/433
- 資料種別:
- 国際会議録
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