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Characterization of MIS Capacitor of BST Thin Films Deposited on Si by RF Magnetron Sputtering

著者名:
掲載資料名:
Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
433
発行年:
1996
開始ページ:
33
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993365 [1558993363]
言語:
英語
請求記号:
M23500/433
資料種別:
国際会議録

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