Characterization of Deep Level Defects in 4H and 6H SiC Via DLTS, SIMS and MeV E-Beam Irradiation
- 著者名:
Doyle, J. P. Aboelfotoh, M. O. Linnarsson, M. K. Svensson, B. G. Schoner, A. Nordell, N. Harris, C. Lindstrom, J. L. Janzen, E. Hemmingsson, C. - 掲載資料名:
- III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 423
- 発行年:
- 1996
- 開始ページ:
- 519
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993266 [1558993266]
- 言語:
- 英語
- 請求記号:
- M23500/423
- 資料種別:
- 国際会議録
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