Blank Cover Image

Dry Etch Damage in InN, InGaN and InAlN

著者名:
Pearton, S. J.
Lee, J. W.
MacKenzie, J. D.
Vartuli, C. B.
Donovan, S. M.
Abernathy, C. R.
Shul, R. J.
Ren, F.
Lothian, J. R.
さらに 4 件
掲載資料名:
III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
423
発行年:
1996
開始ページ:
163
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993266 [1558993266]
言語:
英語
請求記号:
M23500/423
資料種別:
国際会議録

類似資料:

1 国際会議録 Plasma Chemistries for Dry Etching GaN, AlN, InGaN and InAlN

Pearton, S. J., Vartuli, C. B., Lee, J. W., Donovan, S. M., MacKenzie, J. D., Abernathy, C. R., Shul, R. J., McLane, G. …

MRS - Materials Research Society
7 国際会議録 InN-Based Ohmic Contacts to AlInN

Donovan, S. M., Ren, F., MacKenzie, J. D., Abernathy, C. R., Pearton, S. J., Jones, K.

MRS - Materials Research Society
2 国際会議録 Plasma Damage Effects in InAlN Field-Effect Transistors

Ren, F., Lothian, J. R., Chen, Y. K., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Vartuli, C. B., Lee, J. W., …

MRS - Materials Research Society
8 国際会議録 Comparison of Dry-Etch Techniques for GaN, InN, and AlN

Shul, R. J., Vawter, G. A., Willison, C. G., Bridges, M. M., Lee, J. W., Pearton, S. J., Abernathy, C. R.

MRS - Materials Research Society
3 国際会議録 W, WSix and Ti/Al Low Resistance Ohmic Contacts to InGaN, InN and InAlN

Vartuli, C. B., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Shul, R. J., Zolper, J. C., Lovejoy, M. L., Baca, A. …

MRS - Materials Research Society
9 国際会議録 Comparison of ICI and Ibr for Dry Etching of III-Nitrides

Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Pearton, S. J., Abernathy, C. R., Shul, R. J.

MRS - Materials Research Society
4 国際会議録 Chemical Etching of AlN and InAlN in KOH Solutions

Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Pearton, S. J., Abernathy, C. R., Zolper, J. C., Shul, R. J., Ren, F.

MRS - Materials Research Society
10 国際会議録 Substrate Effects on the Growth of InN

Donovan, S. M., MacKenzie, J. D., Abernathy, C. R., Pearton, S. J., Holloway, P. H., Ren, F., Zavada, J. M., Chai, B.

MRS - Materials Research Society
5 国際会議録 ICP Dry Etching of III-V Nitrides

Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Pearton, S. J., Shul, R. J., …

MRS - Materials Research Society
11 国際会議録 Rapid Thermal Processing of III-Nitrides

Hong, J., Lee, J. W., Vartuli, C. B., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Crockett, R. V., Pearton, S. …

MRS - Materials Research Society
6 国際会議録 Current Transport in W and Wsix Ohmic Contacts to InGaN and InN

Vartuli, C. B., Pearton, S. J., Abernathy, C. R., MacKenizie, J. D., Lovejoy, M. L., Shul, R. J., Zolper, J. C., Baca, …

MRS - Materials Research Society
12 国際会議録 Development of GaN and InGaN Gratings by Dry Etching

Lee, J. W., Hong, J., MacKenzie, J. D., Abernathy, C. R., Pearton, S. J., Ren, F., Sciortino, P. F., Jr.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12