Patterning of Silicide Layers by Local Oxidation

Patterning of Silicide Layers by Local Oxidation

著者名:

掲載資料名:

Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

402

発行年:

1996

開始ページ:

549

出版情報:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993051 [1558993053]

言語:

英語

請求記号:

M23500/402

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019834
シリーズID:	PA00000011
会議名:	Symposium on silicide thin films
回次:	1995
会議開催地:	Boston, MA, USA
会議開催年:	1995.11.27-1995.11.30

類似資料:

1 国際会議録 Nanopatterning of Thin CobaltDisilicide Layers by Local Oxidation Klinkhammer, F., Kappius, L., Antons, A., Dolle, M., Trinkaus, H., Mesters, St., Bochem, H-P., Mantl, S., Heinig, K-H. MRS - Materials Research Society	7 国際会議録 Quantum Transport in Ion-Beam-Synthesized Cobalt Disilicide Wires Lenssen, D., Mesters, S., Mantl, S. MRS - Materials Research Society
2 国際会議録 Growth, Patterning and Microelectronic Applications of Epitaxial CobaltDisilicide Mantl, S., Kappius, L., Antons, A., Loken, M., Klinkhammer, F., Dolle, M., Zhao, Q. T., Mesters, S., Buchal, Ch., Bay, … MRS - Materials Research Society	8 国際会議録 SMOOTH SILICIDE FORMATION BY ION BEAM MIXING OF Ti/Si-LAYERS Kohlhof, K., Mantl, S., Stritzker, B. Materials Research Society
3 国際会議録 GROWTH OF BURIED CoSi2 LAYERS IN Si(100) BY MOLECULAR BEAM ALLOTAXY Mantl, S., Bay, H. L., Michel, I., Mesters, S., Trinkaus, H. MRS - Materials Research Society	9 国際会議録 Fabrication of SOI Substrates with Buried Silicide Layers for BiCMOS Applications Wiemer, M., Zimmermann, S., Zhao, Q.T., Trui, B., Kaufmann, C., Mantl, S., Dudek, V., Gessner, T. Electrochemical Society
4 国際会議録 Effect of the Oxidation of a Silicide Layer on Dopant Diffusion in the Underlying Silicon Kappius, L., Tyagi, A. K., Breuer, U., Bay, H. L., Mantl, S. MRS - Materials Research Society	10 国際会議録 Strain Relaxation of He+ Implanted, Pseudomorphic Si1-xGex Layers on Si(100) Hollander, B., Mantl, S., Lenk, St., Trinkaus, H., Kirch, D., Luysberg, M., Hackbarth, Th., Herzog, H.-J., Fichtner, … Materials Research Society
5 国際会議録 Fabrication of nanometer Schottky-tunneling MOSFETs by a novel silicide nanopatterning method Zhao,Q.T., Kappius,L., Mesters,St., Mantl,S. SPIE - The International Society for Optical Engineering	11 国際会議録 Maillard Reactions of Therapeutic Interest Mester, L., Szabados, L., Mester, M. American Chemical Society
6 国際会議録 ALLOTAXY: A NEW METHOD FOR EPITAXIAL GROWTH OF COMPOUND THIN FILMS Mantl, S., Bay. H. L., Dieker, Ch. Materials Research Society	12 国際会議録 Heparin Derivatives of High Molecular Weight Mester, L., Amaya, A. Amit, Mester, M. American Chemical Society

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