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SELF-LUBRICATING, TiN-MoS2 COMPOSITE COATINGS PRODUCED BY SIMULTANEOUS DEPOSITION FROM Ti((CH3)2N)4/NH3/MoF6/H2S GAS MIXTURES

著者名:
Bae, Y. W.
Lee, W. Y.
Besmann, T. M.
Blau, P. J.
More, K. L.
Braski, D. N.
さらに 1 件
掲載資料名:
Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
363
発行年:
1995
開始ページ:
231
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992641 [1558992642]
言語:
英語
請求記号:
M23500/363
資料種別:
国際会議録

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