Ferroelectric PZT thin films on Si and SBN substrates

Ferroelectric PZT thin films on Si and SBN substrates

著者名:

Neurgaonkar,R.R. ( Rockwell Science Ctr. )
Nelson,J.G.
Lin,J.
Cheng,J.

掲載資料名:

Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3008

発行年:

1997

開始ページ:

350

終了ページ:

358

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424198 [0819424196]

言語:

英語

請求記号:

P63600/3008

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019822
シリーズID:	PA00000029
会議名:	Photonics West : Miniaturized Systems with Micro-Optics and Micromechanics
回次:	1997 : 2nd
会議開催地:	San Jose, CA, USA
会議開催年:	1997.02.10-1997.02.12

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