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Real-time preparation-free imaging of mobile charge in SiO2

著者名:
Jastrzebski,L. ( Semiconductor Diagnostics,Inc. )
Edelman,P.
Lagowski,J.J.
Hoff,A.M.
Savchouk,A.
Persson,E.
さらに 1 件
掲載資料名:
Optical characterization techniques for high-performance microelectronic device manufacturing III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2877
発行年:
1996
開始ページ:
207
終了ページ:
217
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422750 [0819422754]
言語:
英語
請求記号:
P63600/2877
資料種別:
国際会議録

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