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Deposition of oxide thin films on silicon using organic self-assembled monolayers

著者名:
DeGuire,M.R. ( Case Western Reserve Univ. )
Shin,H.
Collins,R.J.
Agarwal,M.
Sukenik,C.N.
Heuer,A.H.
さらに 1 件
掲載資料名:
Integrated Optics and Microstructures III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2686
発行年:
1996
開始ページ:
88
終了ページ:
99
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420602 [0819420603]
言語:
英語
請求記号:
P63600/2686
資料種別:
国際会議録

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