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Characterization of SOG(spin on glass)fully etch back process for multilevel interconnection technology

著者名:
Huang,Y.C. ( Taiwan Semiconductor Manufacturing Co. )
Huang,M.H.
Chen,S.F.
Yu,C.H.
Liu,L.M.
Lin,M.S.
さらに 1 件
掲載資料名:
Microelectronic Device and Multilevel Interconnection Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2636
発行年:
1995
開始ページ:
289
終了ページ:
298
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420022 [0819420026]
言語:
英語
請求記号:
P63600/2636
資料種別:
国際会議録

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