Monte Carlo Simulation for Reliability Physics Modeling and Prediction of Scaled (100NM) Silicon MOSFET Devices
- 著者名:
- 掲載資料名:
- Future trends in microelectronics : reflections on the road to nanotechnology
- シリーズ名:
- NATO ASI series. Series E, Applied sciences
- シリーズ巻号:
- 323
- 発行年:
- 1996
- 開始ページ:
- 227
- 終了ページ:
- 236
- 総ページ数:
- 10
- 出版情報:
- Dordrecht: Kluwer Academic Publishers
- ISSN:
- 0168132X
- ISBN:
- 9780792341697 [0792341694]
- 言語:
- 英語
- 請求記号:
- N11482/323
- 資料種別:
- 国際会議録
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6
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An Accurate Monte Carlo Binary Collision Model for BF2 Implants into (100) Single-Crystal Silicon
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