Blank Cover Image

Defect Aspects of Advanced Device Technologies

著者名:
Kolbesen O. B.  
掲載資料名:
Crucial issues in semiconductor materials and processing technologies
シリーズ名:
NATO ASI series. Series E, Applied sciences
シリーズ巻号:
222
発行年:
1992
開始ページ:
3
終了ページ:
25
総ページ数:
23
出版情報:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792320036 [0792320034]
言語:
英語
請求記号:
N11482/222
資料種別:
国際会議録

類似資料:

1 国際会議録 Influence of Silicon Defects on the Electrical Behavior of Semiconductor Power Devices

Schulze, H-J., Kolbesen, B. O.

MRS - Materials Research Society
7 国際会議録 Silicon Crystal for Large Scale Integrated Circuits

Kolbesen O. B.

Martinus Nijhoff Publishers
2 国際会議録 Impact of Defects on the Technology of Highly Integrated Circuits

Kolbesen,B.O., Bergholz,W., Wendt,H.

Trans Tech Publications
8 国際会議録 Chromium(VI)-free Defect Etching Solutions for Application on Engineered Silicon Substrates

J. Maehliss, A. Abbadie, F. Brunier, B.O. Kolbesen

Electrochemical Society
3 国際会議録 Delineation of Crystalline Defects by Preferential Etching: Still more Alchemy than Science?

B. O. Kolbesen

Electrochemical Society
9 国際会議録 Organic Peracid Etches: A New Class of Chromium Free Etch Solutions for the Delineation of Defects in Different Semiconducting Materials

D. Possner, B.O. Kolbesen, H. Cerva, V. Kluppel

Electrochemical Society
4 国際会議録 Process-Induced Defects in Silicon: A Never Ending Story?

Kolbesen, B.O., Cerva, H.

Electrochemical Society
10 国際会議録 CPL reticle technology for advanced device applications

Conley, W.E., Van Den Broeke, D.J., Socha, R.J., Wu, W., Litt, L.C., Lucas, K.D., Roman, B.J., Peters, R.D., Parker, C., …

SPIE - The International Society of Optical Engineering
5 国際会議録 A Chromium-free Defect Etching Solution for Application on SOI

J. Maehliss, A. Abbadie, B. Kolbesen

Electrochemical Society
11 国際会議録 Polarization control for enhanced defect detection on advanced memory devices [6152-64]

Lee, B. H., Ihm, D. C., Yeo, J. H., Gluk, Y., Meshulach, D.

SPIE - The International Society of Optical Engineering
6 国際会議録 Delineation of Crystalline Defects in Semiconductor Substrates and Thin Films by Chemical Etching Techniques

B. Kolbesen, D. Possner, J. Maehliss

Electrochemical Society
12 国際会議録 CLEANING CHEMISTRY WITH COMPLEXING AGENTS (CAs): CA DEGRADATION MONITORING BY UV/VIS SPECTROSCOPY

Doll, O., Kolbesen, B.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12