Comparison and analysis on measurement of optical parameters of some semiconductor films by two methods
- 著者名:
- 掲載資料名:
- Recent advances in metrology, characterization, and standards for optical digital data disks : 21-22 July 1999, Denver, Colorado
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3806
- 発行年:
- 1999
- 開始ページ:
- 169
- 終了ページ:
- 176
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432926 [081943292X]
- 言語:
- 英語
- 請求記号:
- P63600/3806
- 資料種別:
- 国際会議録
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