Electrochemical etching of silicon in aqueous solutions

Electrochemical etching of silicon in aqueous solutions

著者名:

Starosvetsky,D. ( Technion-Israel Institute of Technology )
Kovler,M.
Yahalom,J.

掲載資料名:

Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3680

発行年:

1999

巻:

Part2

開始ページ:

1083

終了ページ:

1090

出版情報:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819431547 [0819431540]

言語:

英語

請求記号:

P63600/3680

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019464
シリーズID:	PA00000029
会議名:	Design, test, and microfabrication of MEMS and MOEMS
回次:	1999
会議開催地:	Paris, France
会議開催年:	1999.03.30-1999.04.01

類似資料:

1 国際会議録 Silicon Electromachining Processes in Aqueous Solutions Kovler, M., Starosuetsky, D., Nemirovsky, Y., Yahalom, J. Materials Research Society	7 国際会議録 Electrochemical Aspects of Copper Chemical Mechanical Planarization (CMP) in Peroxide Based Slurry Ein-Eli, Y., Abelev, E., Starosvetsky, D. Electrochemical Society
2 国際会議録 Revisiting some Vital Issues in Metallic Corrosion Yahalom, J., Starosvetsky, D. Electrochemical Society	8 国際会議録 Characterization of Silicon Carbide Electrochemical Etch in Hydrofluoric Acid Aqueous Solution D'Arrigo, G., Bougiorno, C., Raineri, V. Electrochemical Society
3 国際会議録 Environmental Friendly, Fast Electrochemical Sketching of Silicon Starosvetsky, D., Kovier, M., Yahiom, J., Elim-Eli, Y. Electrochemical Society	9 国際会議録 Electrochemical Impedance Spectroscopic Study of Passive Zirconium in High Temperature Hydrogenated Aqueous Solutions J. Ai, Y. Chen, M. Urquidi-Macdonald, D.D. Macdonald Electrochemical Society
4 国際会議録 Surface Morphology and Electroluminescence of Porous Silicon Layer Prepared on P-Type Silicon with Electrochemical Etching in HF Aqueous Solutions Shigyo, K., Seo, M., Azumi, K., Takahashi, H., Al-Odan, M., Smyrl, W.H. Electrochemical Society	10 国際会議録 Electrochemical Impedance Spectroscopic Study of Passive Zirconium in High Temperature De-aerated Aqueous Solutions D.D. Macdonald, J. Ai, Y. Chen, M. Macdonald Electrochemical Society
5 国際会議録 Features of Copper Passivity in Alkaline Solutions Abelev, E., Starosvetsky, D., Srarosvetsky, J., Ein-Eli, F. Electrochemical Society	11 国際会議録 Electrochemical Etching of n-Type 6H-SiC Using Aqueous KOH Solutions Kato, M., Ichimura, M., Arai, E., Ramasamy, P. Trans Tech Publications
6 国際会議録 Electrochemical Removal of Pentachlorophenol from Aqueous Solutions MacDougall, B., Gattrell, M., Tajwar, S., Fulton, D., Hemming, C.J. Electrochemical Society	12 国際会議録 Three-Dimensional Microstructures in Silicon via the Combination of Light-Ion Beam Writing and Electrochemical Etching Blackwood, D. J., Tea, E. J., Breese, M. B. H., Bettiol, A. A. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12