Optimization of TMAH etching for MEMS
- 著者名:
Brida,S. ( ITC-IRST ) Ferrario,L. Guarnieri,V. Giacomozzi,F. Margesin,B. Paranjape,M. Verzellesi,G. Zen,M. - 掲載資料名:
- Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3680
- 発行年:
- 1999
- 巻:
- Part2
- 開始ページ:
- 969
- 終了ページ:
- 976
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431547 [0819431540]
- 言語:
- 英語
- 請求記号:
- P63600/3680
- 資料種別:
- 国際会議録
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