*Integration issues of (Ba,Sr) TiO3 thin films in high density devices
- 著者名:
Yoo, C. Y. Park, H. B. Hwang, D. S. Hideki, H. Kim, W. D. Lim, H. J. Lee, B. T. Park, Y. W. Lee, S. I. Lee, M. Y. - 掲載資料名:
- Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 596
- 発行年:
- 2000
- 開始ページ:
- 11
- 出版情報:
- Warrendale, PA: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995048 [1558995048]
- 言語:
- 英語
- 請求記号:
- M23500/596
- 資料種別:
- 国際会議録
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4
国際会議録
TuD3:Crystallization behavior of sputter-deposited nitrogen-doped amorphous Ge2Sb2Te5 thin films
SPIE - The International Society for Optical Engineering |
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