IMPROVED ADHESION OF P-DOPED SiO2-INTERFACE LAYERS ON InP BY LOW-TEMPERATURE DAMAGE-FREE PLASMA-CVD
- 著者名:
- 掲載資料名:
- Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 318
- 発行年:
- 1994
- 開始ページ:
- 231
- 出版情報:
- Pittsburgh: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992177 [1558992170]
- 言語:
- 英語
- 請求記号:
- M23500/318
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society for Optical Engineering | |
2
国際会議録
Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers
SPIE-The International Society for Optical Engineering |
Materials Research Society |
3
国際会議録
Integration of InGaAs/InP PIN diodes with Fabry-Perot filters for wavelength-selective receivers
SPIE - The International Society for Optical Engineering |
Trans Tech Publications |
Materials Research Society |
Trans Tech Publications |
Trans Tech Publications |
11
国際会議録
INTERFACE FAILURE OF GOLD COVERED SiO2 SUBSTRATE WITH TiW AND Nb INTERMEDIATE ADHESION LAYERS
Materials Research Society |
Kluwer Academic Publishers |
MRS - Materials Research Society |