CONTROL OF Si-SiO2 INTERFACE PROPERTIES IN MOS DEVICES PREPARED BY PLASMA-ASSISTED AND RAPID THERMAL PROCESSES
- 著者名:
Lucovsky, G. Yasuda, T. Ma, Y. Hattangady, S. V. Xu, X-L. Misra, V. Hornung, B. Wortman, J. J. - 掲載資料名:
- Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 318
- 発行年:
- 1994
- 開始ページ:
- 81
- 出版情報:
- Pittsburgh: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992177 [1558992170]
- 言語:
- 英語
- 請求記号:
- M23500/318
- 資料種別:
- 国際会議録
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