Structure and Mechanical Properties of Reactive Sputter-Deposited TiN/TaN Multilayered Films
- 著者名:
Soe, W-H. Kitagaki, T. Ueda, H. Shima, N. Otsuka, M. Yamamoto, R. - 掲載資料名:
- Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 505
- 発行年:
- 1998
- 開始ページ:
- 463
- 出版情報:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994102 [1558994106]
- 言語:
- 英語
- 請求記号:
- M23500/505
- 資料種別:
- 国際会議録
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