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Removal of Titanium Oxide Grown on Titanium Nitride and Reduction of Via Contact Resistance Using a Modern Plasma Asher

著者名:
掲載資料名:
Chemical aspects of electronic ceramics processing : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
495
発行年:
1998
開始ページ:
345
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994003 [1558994009]
言語:
英語
請求記号:
M23500/495
資料種別:
国際会議録

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