Electronic Properties of Defects Formed in n-Si During Sputter-Etching in an Ar Plasma
- 著者名:
Deenapanray, P. N. K. Auret, F. D. Schutte, C. Myburg, G. Meyer, W. E. Malherbe, J. B. Ridgway, M. C. - 掲載資料名:
- Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 442
- 発行年:
- 1997
- 開始ページ:
- 87
- 出版情報:
- Pittsburgh, Penn: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993464 [1558993460]
- 言語:
- 英語
- 請求記号:
- M23500/442
- 資料種別:
- 国際会議録
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