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FACET FORMATION OF LINESHAPED SILICON MESAS GROWN WITH MICRO SHADOW MASKS

著者名:
Gossner, H.
Fehlauer, G.
Kiunke, W.
Eisele, I.
Stolz, M.
Hintermaier, M.
Knapek, E.
さらに 2 件
掲載資料名:
Molecularly designed ultrafine/nanostructured materials : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
351
発行年:
1994
開始ページ:
393
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992511 [1558992510]
言語:
英語
請求記号:
M23500/351
資料種別:
国際会議録

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