Processing of amorphous silicon flat panel displays with large-area excimer lasers
- 著者名:
- Stehle,M.X. ( SOPRA )
- Godard,B.
- Stehle,J.L.
- 掲載資料名:
- Gas and Chemical Lasers and Applications II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2987
- 発行年:
- 1997
- 開始ページ:
- 74
- 終了ページ:
- 79
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819423986 [081942398X]
- 言語:
- 英語
- 請求記号:
- P63600/2987
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
10
国際会議録
Laser Processing Of Amorphous Silicon For Polysilicon Devices, Circuits And Flat-Panel Imagers
Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
Kluwer Academic Publishers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |