SPC qualification strategy for CD metrology
- 著者名:
- Chain,E.E. ( Motorola )
- Ridens,M.G.
- Annand,J.P.
- 掲載資料名:
- Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2876
- 発行年:
- 1996
- 開始ページ:
- 218
- 終了ページ:
- 224
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422743 [0819422746]
- 言語:
- 英語
- 請求記号:
- P63600/2876
- 資料種別:
- 国際会議録
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4
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Electrical linewidth metrology for systematic CD variation characterization and causal analysis
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