Fabrication and performance characteristics of high-speed ion-implanted Si metal-semiconductor-metal photodetectors
- 著者名:
- Dutta,N.K. ( AT&T Bell Labs. )
- Nichols,D.T.
- Jacobson,D.C.
- Livescu,G.
- 掲載資料名:
- Photodetectors : materials and devices : 1-2 February 1996
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2685
- 発行年:
- 1996
- 開始ページ:
- 150
- 終了ページ:
- 158
- 出版情報:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420596 [081942059X]
- 言語:
- 英語
- 請求記号:
- P63600/2685
- 資料種別:
- 国際会議録
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High-performance GaAs metal-semiconductor-metal photodetectors grown at intermediate temperatures
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