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Fabrication and performance characteristics of high-speed ion-implanted Si metal-semiconductor-metal photodetectors

著者名:
掲載資料名:
Photodetectors : materials and devices : 1-2 February 1996
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2685
発行年:
1996
開始ページ:
150
終了ページ:
158
出版情報:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420596 [081942059X]
言語:
英語
請求記号:
P63600/2685
資料種別:
国際会議録

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