Blank Cover Image

Electrical characterization of defects introduced during plasma-based processing of GaAs

著者名:
Auret,F.D.
Goodman,S.A.
Myburg,G.
Meyer,W.E.
Deenapanray,P.N.K.
Murtagh,M.
Ye,S.-R.
Masterson,H.J.
Beechinor,J.T.
Crean,G.M.
さらに 5 件
掲載資料名:
Defects in semiconductors, icds-19 : proceedings of the 19th International Conference on Defects in Semiconductors, Aveiro, Portugal, July 1997
シリーズ名:
Materials science forum
シリーズ巻号:
258-263
発行年:
1997
巻:
Part2
開始ページ:
1045
終了ページ:
1050
出版情報:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497881 [0878497889]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

類似資料:

1 国際会議録 Electrical Characterization of Defects Introduced During Plasma-Based Processing of GaAs

Auret, F. D., Myburg, G., Meyer, W. E., Deenapanray, P. N. K., Nordhoff, H., Murtagh, M., Ye, Shu-Ren, Masterson, H. J., …

MRS - Materials Research Society
7 国際会議録 Electronic Properties of Defects Introduced during Electron and Alpha Irradiation of GaAs

Atsret,F.D., Goodman,S.A., Meyer,W.E., Erasmus,R.M., Myburg,G.

Trans Tech Publications
2 国際会議録 Optical and Electrical Characterisation of He Plasma Sputtered n-GaAs

Murtagh,M., Hildebrandt,S., Herbert,P.A.F., O'Connor,G.M., Crean,G.M., Auret,F.D., Goodman,S.A., Myburg,G., Meyer,W.E.

Trans Tech Publications
8 国際会議録 Defect Formation by Low Energy Ions during Sputter Deposition of TiW and Au on Epitaxially Grown n-Si at Different Plasma Pressures

Deenapanray,P.N.K., Auret,F.D., Myburg,G., Hayes,M., Meyer,W.E., Schutte,C.

Trans Tech Publications
3 国際会議録 Electrical and optical characterisation of defects iuduced in epitaxially grown n-Si during 1 keV noble gas ion bombardment

Deenapanray,P.N.K., Auret,F.D., Myburg,G., Meyer,W.E., Goodman,S.A.

Trans Tech Publications
9 国際会議録 Electronic Properties and Introduction Kinetics of a Metastable Radiation Induced Defect in n-GaAs

Auret,F.D., Goodman,S.A., Meyer,W.E.

Trans Tech Publications
4 国際会議録 Optical and Electrical Characterization Study of SiCl4 Reactive-Io-Etched GaAs

Murtagh, M., Ye, Shu-Ren, Masterson, H. J., Beechinor, J. T., Crean, G. M., Auret, F. D., Deenapanray, P. N. K., Mayer, …

MRS - Materials Research Society
10 国際会議録 Defect Engineering and Atomic Relocation Processes in Impurity-Free Disordered GaAs and AlGaAs

Deenapanray, P.N.K., Krispin, M., Meyer, W.E., Tan, H.H., Jagadish, C., Auret, F.D.

Materials Research Society
5 国際会議録 Electrical characterization ofelectron beam induced defects in epitaxially grown Si1-xGex

Mamor,M., Auret,F.D., Goodman,S.A., Myburg,G., Deenapanray,P.N.K., Meyer,W.E.

Trans Tech Publications
11 国際会議録 Electrical and Defect Characterization of Sputter Deposited Au and Cr Schottky Barrier Diodes on GaAs

Goodman,S.A., Auret,F.D., Clerc,Y.Le

Trans Tech Publications
6 国際会議録 Electronic properties of defects introduced in n- and p-type Si1-xGex during ion etching

Goodman,S.A., Auret,F.D., Mamor,M., Deenapanray,P.N.K., Meyer,W.E.

Trans Tech Publications
12 国際会議録 Electronic Properties of Defects Formed in n-Si During Sputter-Etching in an Ar Plasma

Deenapanray, P. N. K., Auret, F. D., Schutte, C., Myburg, G., Meyer, W. E., Malherbe, J. B., Ridgway, M. C.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12