Unintentional hydrogenation of III-V semiconductors during device processing
- 著者名:
Pearton,S.J. Abernathy,C.R. Hobson,W.S. Chakrabarti,U.K. Lopata,J. Kozuch,D.M. Stavola,M. - 掲載資料名:
- Proceedings of the 16th International Conference on Defects in Semiconductors : Lehigh University, Bethlehem, Pennsylvania, 22-26 July 1991
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 83-87
- 発行年:
- 1992
- 巻:
- Pt.2
- 開始ページ:
- 617
- 終了ページ:
- 622
- 出版情報:
- Zurich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878496280 [0878496289]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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10
国際会議録
REACTIVE ION ETCHING OF III-V SEMICONDUCTORS USING HYDROGENATED CHLOROFLUOROCARBON MIXTURES
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