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Microflow meter integrated with an optical sensor (Invited Paper)

著者名:
掲載資料名:
Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3321
発行年:
1998
開始ページ:
758
終了ページ:
770
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427625 [0819427624]
言語:
英語
請求記号:
P63600/3321
資料種別:
国際会議録

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