Fabrication of a thick nickel microvalve with truncated pyramid shape

Fabrication of a thick nickel microvalve with truncated pyramid shape

著者名:

Kang,I.-B. ( Univ.of South Australia )
Haskard,M.R. ( Univ.of South Australia )
Samaan,N.D. ( Univ.of South Australia )
Orders,P. ( Univ.of South Australia )

掲載資料名:

Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3321

発行年:

1998

開始ページ:

280

終了ページ:

286

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427625 [0819427624]

言語:

英語

請求記号:

P63600/3321

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019242
シリーズID:	PA00000029
会議名:	Smart Materials, Structures, and MEMS
回次:	1996
会議開催地:	Bangalore, India
会議開催年:	1996.12.11-1996.12.14

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