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Pressure-assisted fusion bonding of silicon wafers

著者名:
Deepa Nair,J.S. ( Indian Institute of Technology )
Prabhu,D. ( Indian Institute of Technology )
Rao,P.R.S. ( Indian Institute of Technology )
DasGupta,A. ( Indian Institute of Technology )
Karmalkar,S. ( Indian Institute of Technology )
DasGupta,N. ( Indian Institute of Technology )
Bhat,K.N. ( Indian Institute of Technology )
さらに 2 件
掲載資料名:
Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3321
発行年:
1998
開始ページ:
248
終了ページ:
252
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427625 [0819427624]
言語:
英語
請求記号:
P63600/3321
資料種別:
国際会議録

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