Diffusion of arsenic and phosphorus in laser-processed-polycrystalline-silicon-thin-films
- 著者名:
- Baumgart, H. ( Bell Laboratories )
- Leamy, H.J. ( Bell Laboratories )
- Trimble, L.E. ( Bell Laboratories )
- Doherty, C.J. ( Bell Laboratories )
- Celler, G.K. ( Bell Laboratories )
- 掲載資料名:
- Grain boundaries in semiconductors : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposia proceedings
- シリーズ巻号:
- 5
- 発行年:
- 1982
- 開始ページ:
- 311
- 終了ページ:
- 316
- 出版情報:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444006974 [0444006974]
- 言語:
- 英語
- 請求記号:
- M23500/5
- 資料種別:
- 国際会議録
類似資料:
North Holland |
North Holland |
North Holland |
North Holland |
North Holland |
North Holland |
North Holland |
MRS - Materials Research Society |
North Holland |
Materials Research Society |
North Holland |
North Holland |