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Bistable planar polysilicon microactuator with shallow arch-shaped leaf springs

著者名:
掲載資料名:
Micromachined Devices and Components V
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3876
発行年:
1999
開始ページ:
274
終了ページ:
279
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434739 [0819434736]
言語:
英語
請求記号:
P63600/3876
資料種別:
国際会議録

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