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Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers

著者名:
Kobayashi,S. ( Toshiba Corp. )
Uno,T.
Yamamoto,K.
Tanaka,S.
Kotani,T.
Inoue,S.
Higurashi,H.
Watanabe,S.
Yano,M.
Ohki,S.
Tsunakawa,K.
さらに 6 件
掲載資料名:
Optical microlithography XII : 17-19 March 1999, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3679
発行年:
1999
巻:
Part2
開始ページ:
614
終了ページ:
621
出版情報:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431530 [0819431532]
言語:
英語
請求記号:
P63600/3679
資料種別:
国際会議録

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