Investigation of thin films using Fourier-transform infrared emission spectroscopy
- 著者名:
- Terpugov,E.L. ( Institute of Cell Biophysics )
- Degtyareva,O.V.
- 掲載資料名:
- Subsurface sensing Technologies and Application II : 31 July-3 August 2000, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4129
- 発行年:
- 2000
- 開始ページ:
- 659
- 終了ページ:
- 665
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437747 [0819437742]
- 言語:
- 英語
- 請求記号:
- P63600/4129
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
American Chemical Society |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering | |
5
国際会議録
In Situ Fourier Transform Infrared Spectroscopy for Real-Time Diagnostics of Thin-Film Processes
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |