Mixed-technology system-level simulation

Mixed-technology system-level simulation

著者名:

掲載資料名:

Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4019

発行年:

2000

開始ページ:

210

終了ページ:

217

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436450 [0819436453]

言語:

英語

請求記号:

P63600/4019

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018977
シリーズID:	PA00000029
会議名:	Design, Test,Integration, and Packaging of MEMS/MOEM
回次:	2000
会議開催地:	Paris, France
会議開催年:	2000.05.09-2000.05.11

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