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High-thermal-impedance beams for suspended MEMS

著者名:
掲載資料名:
Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4019
発行年:
2000
開始ページ:
99
終了ページ:
107
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436450 [0819436453]
言語:
英語
請求記号:
P63600/4019
資料種別:
国際会議録

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