Surface smoothing of polycrystalline Si waveguides with gas-cluster ion beams

Surface smoothing of polycrystalline Si waveguides with gas-cluster ion beams

著者名:

Toyoda, N.

掲載資料名:

Thin films for optical waveguide devices and materials for optical limiting : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

597

発行年:

2000

開始ページ:

51

出版情報:

Warrendale, PA: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558995055 [1558995056]

言語:

英語

請求記号:

M23500/597

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018970
シリーズID:	PA00000011
会議名:	Thin Films for Optical Waveguide Devices and Materials for Optical Limiting : Symposium
回次:	1999
会議開催地:	Boston, MA, USA
会議開催年:	1999.11.30-1999.12.03

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