Dual-Tone and Aqueous Base Developable Negative Resists Based on Acid-Catalyzed Dehydration
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American Chemical Society |
American Chemical Society |
American Chemical Society |
American Chemical Society |
SPIE-The International Society for Optical Engineering |
American Chemical Society |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
5
国際会議録
Chemical characteristics of negative-tone chemically amplified resist for advanced mask making
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |