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Dual-Tone and Aqueous Base Developable Negative Resists Based on Acid-Catalyzed Dehydration

著者名:
掲載資料名:
Polymeric materials for microelectronic applications : science and technology
シリーズ名:
ACS symposium series
シリーズ巻号:
579
発行年:
1994
開始ページ:
70
出版情報:
Washington, DC: American Chemical Society
ISSN:
00976156
ISBN:
9780841230552 [0841230552]
言語:
英語
請求記号:
A05800/579
資料種別:
国際会議録

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